At the Microscopy & Microanalysis (M&M) 2012 Annual Meeting, Bruker today
introduces its new micro-computed tomography (CT) accessory for scanning
electron microscopes (SEM). Micro-CT for SEM can add 2D and 3D high-
resolution X-ray imaging capabilities to third-party SEMs, allowing the
nondestructive analysis of internal microstructures of specimens in numerous
applications, including composite materials, ceramics, electronic components,
filter materials, paper, wood, plants and many others.
Bruker's Micro-CT for SEM can be attached to most SEM models without the
need for any modification to the microscope. The system includes a
microscanner with a target that produces X-rays when hit by the electron beam,
an object rotation stage, and a motorized linear stage to vary the distance
between the X-ray emission point and the object for adjusting the magnification
of the X-ray images. The microscanner can be installed inside the specimen
chamber in place of standard object holders. A direct detection 16 bit CCD
camera is used to record shadow projections of the object's internal
microstructure. Typical exposure times are 2-10 seconds per projection at
electron beam currents of 100-500 nA. The X-ray camera is air-cooled and
available with either 512x512 or 1024x1024 pixel resolution.
The Micro-CT for SEM is suitable to analyze objects with up to 4 mm diameter
and up to 10 mm length without the need for any specific preparation. Due to
the extremely well focused X-ray source, and the precision rotation stage with a
minimum step size of 0.45 deg , details of down to 400 nm size can be
visualized in 3D.
The Micro-CT for SEM is supplied with a powerful software suite including an
acquisition program, a 3D reconstruction module, and a versatile package for
2D and 3D numerical morphology analysis. In addition, a program for 3D
rendering is available to create realistic visual models and movies for virtual
travel through the entire sample volume.
Thomas Schulein, President of the Bruker Nano Analytics division, commented:
"We are excited to take on worldwide distribution of this unique product
following Bruker's acquisition of SkyScan N.V. earlier this year. The Micro-CT for
SEM accessory nicely complements Bruker's existing portfolio of analytical tools
for electron microscopy, enabling our customers to perform even more
comprehensive sample characterization in materials research and life science
applications."