FRT Releases Latest version of MicroProf
Posted: 2014-4-17
The MicroProf® is the successful model from the FRT metrology tool family and
is in use more than 400-fold in the industrial sector. In time for the Control
show, the leading trade fair for industrial metrology in Germany, FRT is
presenting the new version of the internationally established multisensor
measuring device. The MicroProf® excels in its ease of operation with very high
reliability of the measurements.
Higher scanning speed and new measurement options
The latest version of this workhorse appeals by its many improvements and
further developments of the tried and trusted technology. The new MicroProf®
generation is equipped with a wider range of travel of the scanning table, a
higher scanning speed, vibration damping as serial equipment, production-
oriented housing with a control console and monitor arm and a whole lot more.
Furthermore, the CWL topography sensor employed as standard has been
upgraded to 4 kHz. This allows achievement of markedly shorter measuring
times. The software for automated measurement and analysis has also been
completely revised and offers additional new measurement options in addition to
increased user-friendliness.
Equipped for individual measurement tasks
Importance has been attached to even greater modularity in the latest
MicroProf®. This directly benefits the customer. The additional equipment and
also retrofitting of the most diverse multisensory configurations is now even
easier to perform. FRT supplies a wide selection of point sensors, field of view
sensors, film thickness sensors and even a scanning force microscope (AFM) for
this purpose in order to cover the customers' individual measurement
requirements. The device can even be upgraded at the customer's premises to
TTV metrology according to the currently applicable SEMI standards.
In this case, a second CWL sensor is incorporated which measures the
components to be investigated from underneath in parallel with the current
measurement. Furthermore, the surface measuring device can likewise be
retrofitted on site at the customer's premises with a complete wafer handling
module for automatic loading (MHU).
is in use more than 400-fold in the industrial sector. In time for the Control
show, the leading trade fair for industrial metrology in Germany, FRT is
presenting the new version of the internationally established multisensor
measuring device. The MicroProf® excels in its ease of operation with very high
reliability of the measurements.
Higher scanning speed and new measurement options
The latest version of this workhorse appeals by its many improvements and
further developments of the tried and trusted technology. The new MicroProf®
generation is equipped with a wider range of travel of the scanning table, a
higher scanning speed, vibration damping as serial equipment, production-
oriented housing with a control console and monitor arm and a whole lot more.
Furthermore, the CWL topography sensor employed as standard has been
upgraded to 4 kHz. This allows achievement of markedly shorter measuring
times. The software for automated measurement and analysis has also been
completely revised and offers additional new measurement options in addition to
increased user-friendliness.
Equipped for individual measurement tasks
Importance has been attached to even greater modularity in the latest
MicroProf®. This directly benefits the customer. The additional equipment and
also retrofitting of the most diverse multisensory configurations is now even
easier to perform. FRT supplies a wide selection of point sensors, field of view
sensors, film thickness sensors and even a scanning force microscope (AFM) for
this purpose in order to cover the customers' individual measurement
requirements. The device can even be upgraded at the customer's premises to
TTV metrology according to the currently applicable SEMI standards.
In this case, a second CWL sensor is incorporated which measures the
components to be investigated from underneath in parallel with the current
measurement. Furthermore, the surface measuring device can likewise be
retrofitted on site at the customer's premises with a complete wafer handling
module for automatic loading (MHU).
