Imec Presents Back-Side Illuminated CMOS Image Sensor
Posted: 2014-11-21
At this week’s VISION 2014 exhibition, imec presents a backside-illuminated
(BSI) CMOS image sensor chip featuring a new anti-reflective coating (ARC)
optimized for UV light. Targeting imaging solutions in new markets such as life
sciences, the achievement is an important addition to imec’s customized 200mm
CMOS fab. This 200mm process line enables imec to offer design, prototyping
and low volume manufacturing of custom specialty chip solutions such as highly
specialized CMOS image sensors.
Known for its superior enhanced light sensitivity compared with image sensors
using front side illumination (FSI), BSI sensors are top candidates to further
improve the performance of CMOS image sensors. Widely spread today in
consumer applications such as smart phones, BSI imagers are expected to enter
the higher-end application space of e.g. industrial inspection.
BSI imagers have a clear advantage when it comes to fill factor for the pixel area,
angular response, and the complete avoidance of absorption or scattering losses
in the metal interconnect layers. The cost for these light gathering improvement
are the extra process complexity for the backside fabrication and possible
electrical and optical losses at the new backside silicon interface. Therefore the
engineering of the backside layers and interfaces is key to develop high
performance BSI devices
Imec is tackling these challenges to exploit the benefits of BSI imagers for highly
specialized customized imagers for space applications, high speed cameras,
semiconductor inspection and medical applications,... To minimize reflection
losses and maximize transmission of light to the sensor, specific anti-reflective
coatings (ARC) are developed for various applications targeting different regions
of the light spectrum. The coatings are applied at wafer level as part of the BSI
process flow.
Imec has already developed an ARC for visible light range (400nm-800nm) with
>70% QE over the entire spectral range. Imec’s new ARC, targeting the UV range,
shows excellent performance at near UV wavelengths, with Quantum Efficiency
(Q.E.) values above 50 percent over the entire spectral range from 260nm to
400nm wavelength.
"This is an important milestone for imec’s customized 200mm CMOS process
line, demonstrating our expertise and capability to design, prototype and
manufacture high-end CMOS image sensors," said Rudi Cartuyvels, senior vice
president, Smart Systems & Energy Technologies at imec. "The development
widens our portfolio towards new markets, offering solutions for both visible and
UV imaging in semiconductor equipment applications, such as advance
lithography and wafer and mask inspection."
About imec
Imec performs world-leading research in nanoelectronics and photovoltaics.
Imec leverages its scientific knowledge with the innovative power of its global
partnerships in ICT, healthcare and energy. Imec delivers industry-relevant
technology solutions. In a unique high-tech environment, its international top
talent is committed to providing the building blocks for a better life in a
sustainable society. Imec is headquartered in Leuven, Belgium, and has offices in
the Netherlands, Taiwan, US, China, India and Japan. Its staff of over 2,080
people includes more than 670 industrial residents and guest researchers. In
2013, imec's revenue (P&L) totaled 332 million euro. Further information on imec
can be found at www.imec.be. Stay up to date about what’s happening at imec
with the monthly imec magazine, available for tablets and smartphones (as an
app for iOS and Android), or via the website www.imec.be/imecmagazine
Imec is a registered trademark for the activities of IMEC International (a legal
entity set up under Belgian law as a "stichting van openbaar nut"), imec Belgium
(IMEC vzw supported by the Flemish Government), imec the Netherlands
(Stichting IMEC Nederland, part of Holst Centre which is supported by the Dutch
Government), imec Taiwan (IMEC Taiwan Co.) and imec China (IMEC
Microelectronics (Shanghai) Co. Ltd.) and imec India (Imec India Private Limited).
(BSI) CMOS image sensor chip featuring a new anti-reflective coating (ARC)
optimized for UV light. Targeting imaging solutions in new markets such as life
sciences, the achievement is an important addition to imec’s customized 200mm
CMOS fab. This 200mm process line enables imec to offer design, prototyping
and low volume manufacturing of custom specialty chip solutions such as highly
specialized CMOS image sensors.
Known for its superior enhanced light sensitivity compared with image sensors
using front side illumination (FSI), BSI sensors are top candidates to further
improve the performance of CMOS image sensors. Widely spread today in
consumer applications such as smart phones, BSI imagers are expected to enter
the higher-end application space of e.g. industrial inspection.
BSI imagers have a clear advantage when it comes to fill factor for the pixel area,
angular response, and the complete avoidance of absorption or scattering losses
in the metal interconnect layers. The cost for these light gathering improvement
are the extra process complexity for the backside fabrication and possible
electrical and optical losses at the new backside silicon interface. Therefore the
engineering of the backside layers and interfaces is key to develop high
performance BSI devices
Imec is tackling these challenges to exploit the benefits of BSI imagers for highly
specialized customized imagers for space applications, high speed cameras,
semiconductor inspection and medical applications,... To minimize reflection
losses and maximize transmission of light to the sensor, specific anti-reflective
coatings (ARC) are developed for various applications targeting different regions
of the light spectrum. The coatings are applied at wafer level as part of the BSI
process flow.
Imec has already developed an ARC for visible light range (400nm-800nm) with
>70% QE over the entire spectral range. Imec’s new ARC, targeting the UV range,
shows excellent performance at near UV wavelengths, with Quantum Efficiency
(Q.E.) values above 50 percent over the entire spectral range from 260nm to
400nm wavelength.
"This is an important milestone for imec’s customized 200mm CMOS process
line, demonstrating our expertise and capability to design, prototype and
manufacture high-end CMOS image sensors," said Rudi Cartuyvels, senior vice
president, Smart Systems & Energy Technologies at imec. "The development
widens our portfolio towards new markets, offering solutions for both visible and
UV imaging in semiconductor equipment applications, such as advance
lithography and wafer and mask inspection."
About imec
Imec performs world-leading research in nanoelectronics and photovoltaics.
Imec leverages its scientific knowledge with the innovative power of its global
partnerships in ICT, healthcare and energy. Imec delivers industry-relevant
technology solutions. In a unique high-tech environment, its international top
talent is committed to providing the building blocks for a better life in a
sustainable society. Imec is headquartered in Leuven, Belgium, and has offices in
the Netherlands, Taiwan, US, China, India and Japan. Its staff of over 2,080
people includes more than 670 industrial residents and guest researchers. In
2013, imec's revenue (P&L) totaled 332 million euro. Further information on imec
can be found at www.imec.be. Stay up to date about what’s happening at imec
with the monthly imec magazine, available for tablets and smartphones (as an
app for iOS and Android), or via the website www.imec.be/imecmagazine
Imec is a registered trademark for the activities of IMEC International (a legal
entity set up under Belgian law as a "stichting van openbaar nut"), imec Belgium
(IMEC vzw supported by the Flemish Government), imec the Netherlands
(Stichting IMEC Nederland, part of Holst Centre which is supported by the Dutch
Government), imec Taiwan (IMEC Taiwan Co.) and imec China (IMEC
Microelectronics (Shanghai) Co. Ltd.) and imec India (Imec India Private Limited).
